
Abstract—Modern semiconductor manufacturing employs air ionizers to reduce the effects of static charge. These effects are contamination control from electrostatic attraction and on physical damage from discharges. Conventionally, air ionization is generated by corona from needle electrodes, but there are particles generated by this process. In the past, these particles have been too small to affect the manufacturing process, but this is no longer true. The latest small structures on the wafer have reached the limit where these particles will harm the product. This paper discusses the mechanism for particle creation and presents a design which creates no particles.
For more information on Alphaboost, read the white paper Alphaboost Electronically Enhanced Alpha Ionization, or view this Cleanroom Air Ionization in a Nano World presentation. For conference information, visit http://electrostatics.org.